Danaher Motion, USA, has launched a complete wafer positioning system for semiconductor back-end processes under the trademark Dover. Danaher Motion has designed and manufactured a variety of positioning systems, specifically designed to reduce manufacturing time and optimize manufacturing levels.
Smoother, quieter, faster
Wafer furnace system applications
![]()
Danaher Motion's high-precision linear motion systems, slides, and stands allow wafer processing equipment to operate longer, smoother, and more.
From motor to reducer, actuator to bearing system, with more than 50 years of experience and the widest range of product choices, the most cost-effective, highest-performance packaged solution can be designed from the same technology source.
Wafer transport system applications
![]()
Danaher Motion's high-precision linear motion systems, slides, and benches allow chip processing equipment to run longer and smoother...and operate in cycles.
From motor to reducer, actuator to bearing system, with more than 50 years of experience and the widest range of product choices, the most cost-effective, highest-performance packaged solution can be designed from the same technology source.
Danaher Motion's High Performance Positioning System Example
High performance 200mm and 300mm wafer platforms:
Danaher Motion, USA The Triathalon plane air bearing, linear motion wafer platform delivers accurate, high-productivity, and stable end products.
Air bearing FPD gantry system:
Danaher Motion's industry-leading universal 5, 6 and 7 bench systems meet the most demanding environmental requirements.
Constant speed scanning platform:
The Danaher Motion Air Bearing Scanning Platform has 31 picometers of resolution and maintains CV tracking errors of less than 5 nanometers, and is designed for most demanding image applications.
High vacuum positioning system:
Used to get the entire body directly into the process chamber (minimum vacuum level 1 X 10 -8 Torr).
High speed air bearing:
High-efficiency wafer scanning in very compact X-axis components.
![]()
Smoother, quieter, faster
Wafer furnace system applications
Danaher Motion's high-precision linear motion systems, slides, and stands allow wafer processing equipment to operate longer, smoother, and more.
From motor to reducer, actuator to bearing system, with more than 50 years of experience and the widest range of product choices, the most cost-effective, highest-performance packaged solution can be designed from the same technology source.
Wafer transport system applications
Danaher Motion's high-precision linear motion systems, slides, and benches allow chip processing equipment to run longer and smoother...and operate in cycles.
From motor to reducer, actuator to bearing system, with more than 50 years of experience and the widest range of product choices, the most cost-effective, highest-performance packaged solution can be designed from the same technology source.
Danaher Motion's High Performance Positioning System Example
High performance 200mm and 300mm wafer platforms:
Danaher Motion, USA The Triathalon plane air bearing, linear motion wafer platform delivers accurate, high-productivity, and stable end products.
Air bearing FPD gantry system:
Danaher Motion's industry-leading universal 5, 6 and 7 bench systems meet the most demanding environmental requirements.
Constant speed scanning platform:
The Danaher Motion Air Bearing Scanning Platform has 31 picometers of resolution and maintains CV tracking errors of less than 5 nanometers, and is designed for most demanding image applications.
High vacuum positioning system:
Used to get the entire body directly into the process chamber (minimum vacuum level 1 X 10 -8 Torr).
High speed air bearing:
High-efficiency wafer scanning in very compact X-axis components.